The JSM-7001F is a Field Emission – Scanning Electron Microscope (FE-SEM) with a hot (Schottky) electron gun equipped with a large, 5-axis, fully eccentric, motorized, automated specimen stage, a one-action specimen exchange airlock, small probe diameter even at large probe current and low voltage.
Resolution (secondary electron image)
1.2 nm (at 30 kV)
3.0 nm (at 1.0 kV)
3.0 nm (at 15 kV 10mm WD, 5nA)
0.5 to 2.9 kV (10V steps)
3.0 to 30 kV (100V steps)
x10 to x1,000,000
SEI (secondary electron image)
BEI (backscattered electron image TOPO and COMPO)
Other analytical techniques
EDXS (Energy Dispersive X-ray Spectroscopy)
Coating system and other SEM sample preparation tecniques are suitable.